Counting atoms with quantitative scanning transmission electron microscopy

Standardless atom counting in scanning transmission electron microscopy.

We demonstrate that high-angle annular dark-field imaging in scanning transmission electron microscopy allows for quantification of the number and location of all atoms in a three-dimensional, crystalline, arbitrarily shaped specimen without the need for a calibration standard. We show that the method also provides for an approach to directly measure the finite effective source size of a scanni...

Three-Dimensional Observation of Dopant Atoms in Quantitative Scanning Transmission Electron Microscopy

One of the ultimate goals in electron microscopy is 3-dimensional (3D) atomic scale information. The main challenge in obtaining 3D information in microscopy originates from the limited depth resolution. The depth resolution of scanning transmission electron microscopy (STEM) remains above ~10 nm, even with state-of the-art STEM with aberration correction [1]. Through-focal series and confocal ...

15. Scanning Transmission Electron Microscopy

Scanning transmission low-energy electron microscopy

We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing t...

Z-contrast Scanning Transmission Electron Microscopy